Electronic Materials and Processing

This division focuses on the science and technology pertaining to preparation, growth, processing and characterization of materials used in device fabrication. Typical interests include silicon and compound semiconductors, the structure of interfaces and their growth and processing, CVD and MBE deposition, e-beam and photo-lithography, plasma- and ion-etching techniques, surface chemical behavior, quantum well structures, opto-electronics, VLSI/submicron devices, interconnects and packaging.

Topics Organization Statutes Workshops Divisional Reports


Typical Electronic Materials Processing topics include:

  • Fundamental mechanisms in dry etching
  • New developments in lithography
  • Fundamental properties of superlattices
  • Applications of high speed semiconductors
  • Metal/semiconductor interfaces
  • Ferroelectric materials
  • Applications of opto-electronics
  • Silicides and interconnects in VLSI
  • Films: Epitaxial growth
  • Thin insulators for photovoltaic and thin film display applications
  • Semiconductor surfaces quantum well structures
  • Heteroepitaxy
  • Chemical vapor deposition


Electronic Materials and Processes Division
2016-2019 Triennium
Electronic Materials and Processes Division
2013-2016 Triennium
Chair Croatia Ivana Capan Chair Croatia Ivana Capan
Vice Chair Germany Detlev Grützmacher Vice Chair Poland Jacek Szuber
Secretary Portugal Reinhard Schwarz Secretary Portugal Reinhard Schwarz
Representatives Argentina Romualdo A Ferreyra Representatives Argentina
Australia Rod Elliman Australia Rod Elliman
Austria Günther Springholz Austria Günther Springholz
Belgium J.-F. de Marneffe Belgium J.-F. de Marneffe
Brazil Jose A. Diniz Brazil Angelo L. Gobbi
Bulgaria Petko Vitanov Czech Republic Ivan Ostadal
Czech Republic Ivan Ostadal
Finland Sami Franssila Finland Sami Franssila
France France
Great Britain Germany Detlev Grützmacher
Hungary Gyorgy Molnar Great Britain Kevin Prior
India M. Mascarenhas Hungary Bela Pecz
Iran India K. C. Mittal
Israel Iris Visoly Fisher Iran
Italy Luciano Scaltrito Israel Shahar Richter
Japan Yoichi Kawakami Italy Alberto Lui
Korea Jin Dong Song Japan Yoichi Kawakami
Mexico Miguel Angel Santana-Aranda Korea Jong Su Kim
Netherlands Mexico Wilfrido Calleja Arriaga
Pakistan Mohammad Aslam Netherlands
Philippines Alexander G. Mendenilla Pakistan Mohammad Aslam
P.R. China Shaozhi Deng P.R. China Ningsheng Xu
Russian Federation Gennady G.Bondarenko Russian Federation Gennady G.Bondarenko
Slovakia Mario Kotlar Slovakia Jaroslav Kovac
Slovenia Drago Resnik Slovenia Janez Kovac
Spain A. Lousa Spain Drago Resnik
Sweden Lars-Erik Wernersson Sweden Anders Mikkelsen
Switzerland Switzerland
USA Lisa Porter USA Lisa Porter



Statutes of the Electrical Materials and Processing Division (EMP Division)
Article 1 – Name
The organization shall be known as the EMP Division of the International Union for Vacuum Science, Technique and Applications (IUVSTA), registered in Brussels, Belgium.
Article 2 – Objectives
The objectives of the Division are to promote, encourage and develop the science and technology associated with EMP in all countries, mainly through the following means:
A. The Division will liaise with national and international bodies active in the field of science/technology of EMP with the particular aim of effective coordination, at the international level, and act to relay information on local national meetings.

B. The Division will be concerned with the organization of technical sessions at the International Vacuum Congress and other international conferences, topical conferences, summer schools, workshops, short courses, educational activities and exhibitions.

C. The Division will promote the publication of scientific papers in proceedings, scientific journals and books in the science and technology of EMP.

D. The Division will contribute to other activities of the IUVSTA, in particular those of interest to EMP.

Article 3 – Membership
All members from countries which have Vacuum Societies or National committees that are members of IUVSTA can take part in planning the activities of the Division and influencing policy decisions.

Article 4 – Divisional Committee
The Divisional Committee is the nucleus of the EMP Division and decides upon all scientific matters of Divisional interest. The Divisional Committee will have an elected Chairperson, Vice-Chairperson and Secretary/Treasurer.

Article 5 – Structure of the Division, Nominations and Elections
A. Each National Committee within IUVSTA is invited to nominate one Divisional representative, chosen for his or her special interest in the subject of the Division. The nominated representatives for the EMP Division will act as the Divisional Electoral College. In the event of death or permanent incapacity of such a representative, the National Committee which had nominated this delegate shall nominate a new delegate as member of the Divisional College.

If the membership of the Divisional College exceeds 10 in number the members of the Divisional College will elect from their own ranks seven (7) members of the Divisional Committee. The election of the future Divisional Committee will be organized and conducted by the Secretary of the present Divisional Committee under the direction of the Chairman of the present Divisional Committee. The election of the Divisional Committee is carried out by vote by correspondence. Each representative votes for seven (7) members; those representatives who get the highest number of votes are elected as members of the Divisional Committee. Each electoral college member should give an order of preference in casting votes for the Divisional Committee; if and only if there is a tie vote (for the last member), the order of preference will be used to decide who will be elected. If there is still a tie situation then all those members in the tie shall serve on the Divisional Committee and the Committee will have more members for that triennium. In the case of resignation, death or permanent incapacity of a Divisional Committee member, that person shall be replaced by the member of the Divisional College who received the greatest number of votes among those not elected in the original vote by correspondence.

B. The elected Divisional Committee members may, in turn, co-opt three (3)other members. The co-opted members would be experts in the field; membership of national Committees is not required. It is suggested that the immediate past chairperson be considered for a co-opted member to provide advice and guidance. In the final Divisional Committee, normally no more than two persons domiciled in the same country shall be members.

C. The Divisional Committee should elect a Chairperson, a Vice-Chairperson, and a person to act as both Secretary and Treasurer from its own members who are also members of the Divisional College. Co-opted members may not be Divisional Officers. Each member of the Divisional Committee will indicate his or her preference among the Committee membership for these three positions; the person with the highest preference will be elected Chairperson, the positions of Vice-Chairperson and Secretary-Treasurer will be filled from the next two highest preferences.

On acceptance of these statutes by the IUVSTA Executive Council, the EMP Division will abide by the following procedure in the selection of co-opted members of the Divisional Committee.

The Divisional Committee may extend by majority vote to the Divisional Chairperson the right to select persons to become co-opted members of the Divisional Committee. It is suggested that this item be placed on the ballot when the Divisional Committee votes for Divisional Officers. It is further suggested that, at the time of the ballot, the Divisional Committee members may asked to suggest persons for consideration by the Chairperson for co-opted status.

D. The same person may be the national representative for more than one Division, but may be a member of no more than two Divisional Committees.

E. All members of the Divisional Committee and the Divisional College will serve for a three-year term; normally no member shall serve for more than six consecutive years. An exception to this rule is allowed for a previous Chairperson of the Committee who may be co-opted as suggested in Article 5.B. In general, the three year term will start at the ordinary General Meeting held during the triennial IVC meetings. The election procedure for the Divisional Committee should be completed two months before the ordinary General Meeting. The existing Divisional Committee will remain in charge until the next ordinary General meeting.

F. On the first working day of the 5th calender month before the date of any Ordinary General Meeting the Chairperson of the Division shall arrange with the Secretary/Treasurer of the Division to initiate the electoral processes for the new Committee. The Chairperson shall announce the election results by mailing to the members of the Divisional College.

Article 6 – Divisional College
Divisional representatives who form the Divisional College will elect the Divisional Committee (see Article 5). The Divisional representatives will serve during the three-year term as contact persons between their own national Committee and the EMP Divisional Committee. They will be kept informed of the Divisional Committee actions and, in turn, should ensure that their national committee is kept informed of those actions.

In cases of basic and important questions, all Divisional Representatives should be consulted by the Divisional Committee.

Article 7 – Duties of the officers of the Division
A. The Divisional Chairperson shall represent the Division in meeting of the Executive Council of IUVSTA and will report on the activities of the Division in Executive Council Meetings. Outside the Union he/she will represent the Division especially with respect to interactions with other international or national scientific and technical societies.

B. The Divisional Chairperson will preside at all business meetings of the Divisional Committee and Divisional College.

C. The Divisional Vice-Chairperson shall carry on all duties of the Chairperson in the event of the Chairperson’s absence, illness, resignation, or incapacity; he/she should carry out such other duties as may be assigned by the Chairperson.

D. The Secretary/Treasurer shall be responsible for the minutes of all Divisional Committee and Divisional College Meetings. He/She shall be in charge of all correspondence pertaining to the operation of the Division at the discretion of the Chairperson. The Secretary/Treasurer shall keep a strict accounting of all income and expenditures. He/She may pay out such funds as authorized by the Chairperson, or the Vice-Chairperson if the Chairperson is incapacitated, to meet all obligations of the Division. He/She shall issue a report of the financial standing of the Division at the business meeting of the Division or whenever required by the Chairperson. He/She should file an annual Divisional Treasurer’s Report and a Request for a Budget for the following year with the Director of the Scientific and Technical Directorate of the Union at the preceding year’s end.

E. The Officers of the Division (Chairperson, Vice-Chairperson and Secretary) should be members of the National Committee of the country where they have chosen their domicile

F. In case of resignation of the elected Chairperson, the Vice-Chairperson will act as Chairperson for the remaining part of the three-year term.

Article 8 – Finances
Members of the Divisional Committee are encouraged to solicit support from their National Committees for travel to committee meetings. In general, no funds will be available for travel expenses of Committee members.

The Secretary/Treasurer of the Divisional Committee will be responsible for the administration of any income and expenditure.

Article 9 – Specified Activities
A. Triennial Congress
The Divisional Committee will nominate a number of members of the associated Divisional International Programme Committee (IPC) of the Congress. These nominees provide the international component of the IPC and will comprise mainly Divisional Committee members, although the Committee may wish to include other nominees to improve the scientific or national balance, making use particularly of other members of the Divisional Electoral College. The number of nominees will be decided by the Congress Chair but ranges from 3 for Divisions with few sessions in the Congress to 10 for those with many sessions.

The Divisional Committee will also nominate, from within its group of individual nominees, two alternative possible chairpersons for this Divisional IPC. One of these will be selected by the Congress Scientific Chairperson, bearing in mind the need for some national balance and the need for good communications. The IPC Divisional Chairperson and the Congress Scientific Chairperson form the Scientific Organizing Committee for overall program decisions. The Divisional IPC will be responsible for nominating Invited Speakers and for the selection of contributed abstracts into oral and poster sessions. In the first round of information collection concerning the identification of possible Invited Speakers and session topics the IPC should seek the views of all members of the Divisional College.

An approximate timeline for these activities is:

  1. Nominations of IPC members by Divisional Committee; – 32 months
  2. JFinal IPC membership agreed; – 30 months
  3. Final lists of Invited Speakers/Session topics; – 20 months
  4. Abstract selection meeting; – 6 months

A full set of guidelines is available in the IUVSTA Procedures Manual.

Article 10 – Amendments
These statutes may be amended by a majority vote of ballots cast by members of the Divisional College. A minimum of two-thirds of the total number of members of the Divisional College must participate in this balloting. Voting on amendments will be organized by the Secretary/Treasurer of the Divisional Committee and will be by vote by correspondence.

Any such amendments are subject to confirmation by the Executive Council of the Union.

Any proposed amendments would be discussed with the Director of the Scientific and Technical Directorate, prior to submission to the members of the Divisional College.

Divisional Reports